Manufacturing Techniques for Microfabrication and Nanotechnology

Taylor & Francis

Manufacturing Techniques for Microfabrication and Nanotechnology

Ordinarie pris 1 031 kr
Enhetspris  per 
Moms ingår.

Författare: Marc J. Madou
E-bok ISBN: 9781439891803
ISBN: 9781420055191
Språk: English
Upplaga: 1
Utgivningsår: 2011


Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the d